Scanning Electron Microscope (SEM)


FEI Nova NanoSEM 450

Overview: This field emission scanning electron microscope (SEM) has an ultra-stable, high current Schottky gun.  Advanced electron optical and detection features include immersion mode, beam deceleration mode, and a variety of secondary and backscatter electron detectors (listed below) for best selection of the information and image optimization. Low vacuum mode optimizes imaging of non-conducting and uncoated specimen. Resolution limits are 1.4 nm @ 1 kV in high vacuum mode; 1.8 nm @ 3 kV in low vacuum mode 30 Pa.  This instrument also includes EDS and cryoSEM capabilities.



For high vacuum mode: 

  • Everhart-Thornley Detector (ETD)
  • Through the Lens Detector (TLD)
  • Circular Backscatter Detector (CBS)
  • Scanning Transmission Electron Detector (STEM)

For low vacuum mode: 

  • Low Vacuum Detector  (LVD)
  • Helix Detector
  • Gaseous Analytical Detector (GAD)


Energy Dispersive X-ray Spectroscopy (EDS) Microanalysis Equipment

Oxford AZtecEnergy Microanalysis System with X-Max 80 Silicon Drift Detector



Leica VCT and MED020 for fracturing, etching, coating and examination of SEM samples at low temperature


Sample Preparation Equipment

Acknowledging BEML facility and funding agencies



Xuanhao operating SEM